申请人 |
MITSUI CHEMICALS, INC.;SHIN-ETSU CHEMICAL CO., LTD. |
发明人 |
HAKUTA, TAKASHI;KAWASAKI, MASAAKI;KIKUCHI, YOSHIHARU;NAKAHAMA, HIDENARI;KODA, TAKU;KAMEDA, HIROSHI;NONAKA, SHUICHI;HOSOYA, MIKIO;ISHII, YUJI;ARINO, MITSUNAO;NAKAMURA, TSUTOMU;HIRABAYASHI, SATAO;YOSHIDA, TAKEO |