发明名称 |
Method and apparatus for incorporating control simulation environment |
摘要 |
The present invention provides for a method and an apparatus for implementing a control simulation environment into a manufacturing environment. A process task is defined. A process simulation function is performed to produce simulation data corresponding to the process task. The simulation data is integrated with a process control environment for controlling a manufacturing process of a semiconductor device.
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申请公布号 |
US6802045(B1) |
申请公布日期 |
2004.10.05 |
申请号 |
US20010838498 |
申请日期 |
2001.04.19 |
申请人 |
ADVANCED MICRO DEVICES, INC. |
发明人 |
SONDERMAN THOMAS J.;TOPRAC ANTHONY J.;PETERSON ANASTASIA OSHELSKI |
分类号 |
G05B19/418;G06F17/50;H01L21/66;(IPC1-7):G06F17/50 |
主分类号 |
G05B19/418 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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