| 摘要 |
A write gap film and a first magnetic material film are formed on a bottom pole, a first non-magnetic film is formed in a space formed by etching a portion of the first magnetic material film other than a portion extending from an air bearing surface to a throat height zero reference position to constitute a flat coplanar surface with the first magnetic material film, a second magnetic material film is formed on the flat coplanar surface, a two-layer track pole consisting of a top track pole and a bottom track pole is formed in a self-aligned manner by removing by RIE the second magnetic material film, first magnetic material film, write gap film and a part of the bottom pole, a second non-magnetic material film is formed to have a flat coplanar surface with the top track pole, and a thin film coil is formed on the flat coplanar surface. The thin film coil includes first and second thin film coil halves formed in a self-aligned manner, an insulating film interposed between successive coil windings of the first and second thin film coil halves and a jumper wiring electrically connecting an innermost coil winding of the first thin film coil half to an outermost coil winding of the second thin film coil half. Finally a top pole is formed such that one end of the top pole is magnetically coupled with the top track pole and the other end of the top pole is magnetically coupled with the bottom pole at a back gap.
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