| 发明名称 |
Abrasive for metal |
| 摘要 |
An abrasive for metal having particle that have a functional group capable of trapping a metal ion, a process for producing the abrasive, and a polishing composition having the abrasive, an oxidizing agent and water, are provided. |
| 申请公布号 |
US6800105(B2) |
申请公布日期 |
2004.10.05 |
| 申请号 |
US20010756140 |
申请日期 |
2001.01.09 |
| 申请人 |
SUMITOMO CHEMICAL COMPANY, LIMITED |
发明人 |
UEDA KAZUMASA;TAKASHIMA MASAYUKI |
| 分类号 |
B24B37/00;B24B37/04;B24D3/28;C09G1/02;C09K3/14;C09K13/00;C23F3/00;H01L21/304;H01L21/321;(IPC1-7):C09G1/02;C09G1/04 |
主分类号 |
B24B37/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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