发明名称 |
Removable semiconductor wafer susceptor |
摘要 |
A removable semiconductor wafer susceptor used for supporting a substrate during batch processing. The susceptor includes a flat circular central plane with a predetermined outer diameter. The susceptor is sized to fit within an inner diameter formed from wafer support ledges of a wafer transport container. The susceptor includes edges that are chamfered and rounded to lessen stress concentration at the edges. The susceptor is transported through processing by a sieving action of transport automation.
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申请公布号 |
US6799940(B2) |
申请公布日期 |
2004.10.05 |
申请号 |
US20020310141 |
申请日期 |
2002.12.05 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
JOE RAYMOND;DIP ANTHONY |
分类号 |
H01L21/677;B65G49/07;H01L21/00;H01L21/205;H01L21/673;H01L21/683;H01L21/687;(IPC1-7):B65G49/07 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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