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发明名称
TWO-LAYER FILM AND METHOD OF FORMING PATTERN WITH THE SAME
摘要
申请公布号
KR20040083336(A)
申请公布日期
2004.10.01
申请号
KR20037013922
申请日期
2002.11.15
申请人
发明人
分类号
G03F7/26;G03F7/023;G03F7/095;G03F7/40
主分类号
G03F7/26
代理机构
代理人
主权项
地址
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