METHOD FOR FORMING ORIENTATION FILM IN MULTI-DOMAIN STRUCTURE BY ION BEAM RADIATION

摘要

PURPOSE: A method for forming a multi-domain orientation film is provided to simplify the multi-domain orientation film forming procedure by disposing a mask having a predetermined pattern to an orientation film and rotating a substrate while radiating ion beams. CONSTITUTION: A method for forming a multi-domain orientation film includes the steps of forming an orientation film on a substrate and aligning a mask on the substrate with a predetermined distance from the substrate(S100), and forming a first orientation direction to the orientation film by radiating ion beams primarily while making the substrate inclined in a first direction(S110). A second orientation direction is formed to the orientation film by radiating ion beams secondarily while making the substrate inclined in the opposite direction by rotating the substrate and re-aligning the mask on the orientation film(S120-S140).