| 摘要 |
PURPOSE: A wafer loading system of heat treatment equipment for fabricating a semiconductor device is provided to perform stably a fabrication process and improve the productivity by using an identification mark and a detection sensor for sensing the identification mark. CONSTITUTION: A boat(32) includes identification marks for each loading part of plural wafers, a side dummy, and a monitoring wafer. A robot is used for loading the plural wafers, the side dummy, and the monitoring wafer. A detection sensor is installed at the robot in order to recognize the identification mark. A database is used for storing information about plural wafers. A controller is used for receiving the wafer information and sensing signals of the detection sensor to perform a predetermined process from the database and controlling an operation of the robot.
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