| 摘要 |
PURPOSE: A method for fabricating an optical device is provided to connect correctly an optical waveguide to an optical fiber by performing a simple process without using a high-priced alignment apparatus. CONSTITUTION: A third region of a substrate(100) is etched as much as the predetermined depth. A lower clad layer(200) is formed on the entire surface of the substrate. A first region and a second region are exposed from the substrate by removing partially the lower clad layer. Silicon nitride layers(310,320) are formed on the first and the second regions of the substrate. Core layers(420,430) are formed on the entire surface of the substrate. An optical waveguide is formed on the third region and a first and a second groove pattern are formed on the first and the second regions by patterning the core layer and the silicon nitride layer. A first groove and a second groove are formed by performing an etch process using the first and the second groove patterns. Optical fibers are arranged in the first and the second grooves.
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