摘要 |
<p>The micro-sensor has a pair of control electrode (13A, 13B) controlling vibration of vibrators (11, 12) for delivering a signal. A differential amplifier (32) has an operational amplifier, an auto-exciter oscillator (30) and an inverter (31) for controlling the vibrators with reciprocally opposite phases, using the delivered signal. A pair of control electrode (14A, 14B) controls the vibrators based on two control signals.</p> |