发明名称 |
Apparatus and method for measuring EUV light intensity distribution |
摘要 |
A light intensity distribution measuring apparatus for measuring a light intensity distribution in light with a wavelength of 20 nm or smaller emitted from a light source includes plural light intensity detector units each including a mirror and a photoelectric conversion element, and measures the light intensity distribution so that an incident angle of the light incident upon the mirror is a predetermined angle.
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申请公布号 |
US2004188628(A1) |
申请公布日期 |
2004.09.30 |
申请号 |
US20040808657 |
申请日期 |
2004.03.25 |
申请人 |
KANAZAWA HAJIME;MIYAKE AKIRA |
发明人 |
KANAZAWA HAJIME;MIYAKE AKIRA |
分类号 |
G01J1/02;G01J1/42;G03F7/20;H01L21/027;(IPC1-7):G01J1/06 |
主分类号 |
G01J1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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