发明名称 Bump style MEMS switch
摘要 A microelectromechanical system switch may be formed with a protrusion defined on the substrate which makes contact with a deflectable member arranged over the substrate. The deflectable member may, for example, be a cantilevered arm or a deflectable beam. The protrusion may be formed in the substrate in one embodiment using field oxide techniques.
申请公布号 US2004188781(A1) 申请公布日期 2004.09.30
申请号 US20030403738 申请日期 2003.03.31
申请人 BAR HANAN 发明人 BAR HANAN
分类号 H01H59/00;(IPC1-7):H01L29/82 主分类号 H01H59/00
代理机构 代理人
主权项
地址