Fluorine-containing compounds, fluorine-containing polymerizable monomers, fluorine-containing polymers, dissolution inhibitors, and resist compositions

摘要

The invention relates to a fluorine-containing compound containing a substituent represented by the formula 1: where R<1 >is (a) a straight-chain or branched alkyl or alkylene group, (b) a cyclic structure containing an aromatic ring group or aliphatic cyclic group, or (c) a substituent containing an aromatic ring group and an aliphatic cyclic group, and R<1 >optionally contains fluorine, another halogen, CN, oxygen, nitrogen, silicon, or alcohol, and R<2 >is a hydrogen atom, a straight-chain or branched alkyl group, an aromatic group, or a hydrocarbon group optionally containing an aliphatic cyclic group, and R<2 >optionally contains fluorine, oxygen, nitrogen, carbonyl bond, or alcohol, and a plural number of R<2 >having different structures are optionally contained in the molecule.