POWER SUPPLY UNIT FOR A GAS DISCHARGE PROCESS

摘要

The invention relates to a method for generating an output direct voltage of a power supply unit (1) for a gas discharge process, whereby in a first voltage transforming step (2), a first direct voltage is transformed into a second direct voltage of a pre-determined voltage range, and in a second voltage transforming step (3), the output direct voltage is generated from the second direct voltage. According to the invention, in order to generate the output direct current in the second voltage transforming step, a switching element (23) of at least one step-up converter (20) is switched with a regulated pulse duty factor. The inventive method enables the plasma process to be ignited and maintained.