| 发明名称 |
Micro-imprinting method and template for use in same |
| 摘要 |
A micro-imprinting method, and template for use in such a method, in which at least one surface of the template includes an alkyl silane release coating, where the alkyl silane is free of fluorine atoms.
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| 申请公布号 |
US2004191639(A1) |
申请公布日期 |
2004.09.30 |
| 申请号 |
US20030397459 |
申请日期 |
2003.03.26 |
| 申请人 |
JIN DANLIANG;KRESSBACH JEFFREY K. |
发明人 |
JIN DANLIANG;KRESSBACH JEFFREY K. |
| 分类号 |
G02B5/18;G03F1/14;G03F7/00;G03F7/20;G03F7/26;G03F9/00;H01L21/56;H05K3/12;(IPC1-7):G03F9/00 |
主分类号 |
G02B5/18 |
| 代理机构 |
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