DEVICE FOR AND METHOD OF GENERATING EXTREME ULTRAVIOLET AND/OR SOFT X-RAY RADIATION BY MEANS OF A PLASMA

摘要

A method is described for generating extreme ultraviolet and/or soft X-ray radiation by means of a plasma that can be generated through irradiation of a material. In order to obtain a reduction in the contamination of an optical illumination system as well as an instantaneous optimization of the power of a radiation source (50), it is suggested that at least a quantity of the material is controlled by means of a blocking device (70).