Mobile, electrostatic substrate click for wafers in semiconductor manufacture, comprises additional capacitor structures for charge storage, extending over several electrode levels, on support substrate

摘要

In mobile electrostatic substrate chuck (1), additional capacitor structures for charge storage extend over several electrode levels on support substrate. Capacitor structures form energy stores for providing clamping force of mobile electrostatic substrate chucks. There are several layers of identical or diverse dielectric thin films stacked between electrodes (3,4;5,6) on insulating support substrate, with individual films 0.01 to 40 microns thick. Extra dielectric film (7) separate electrodes (3,4).