MEMS GYROSCOPE INSENSITIVE TO IMPACT AND CAPABLE OF ADJUSTING Q VECTOR AND METHOD FOR PROCESSING SIGNAL THEREOF

摘要

PURPOSE: A MEMS gyroscope and a method for processing a signal thereof are provided to suppress a peaking phenomenon without incurring an over-phase delay by utilizing an exact matching scheme. CONSTITUTION: A MEMS gyroscope includes a body(210) for generating a capacitance value according to a movement of a mass, which moves when a driving signal is applied to a driving electrode. First and second current/voltage converters(220,230) are provided to convert current outputted from first and second detection electrodes into voltage. Voltage signals outputted from the first and second current/voltage converters(220,230) are amplified by means of first and second amplifiers(240,250). An adder(260) adds amplifying signals to each other and sends the amplifying signals to a demodulator. A Q-vector adjuster(280) is provided to apply power to the body(210).