| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve the service life of a template used for a polishing device for polishing a surface of a substrate such as a glass substrate used for a liquid crystal display. <P>SOLUTION: This substrate polishing head comprises a head base part forming a connecting part with the polishing device, and a sub-carrier arranged under the head base part, and receiving an upper surface of the glass substrate B by the lower end. The template 5 is arranged on the lower end side of the sub-carrier for receiving the outer peripheral edge of the glass substrate B received by the sub-carrier. In the template 5, an area for receiving the peripheral edge of at least the glass substrate B is composed of a rubber material, and its elastic deformation is facilitated. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
