| 摘要 |
PROBLEM TO BE SOLVED: To provide a cutting apparatus which reliably removes cutting refuse stuck to a protection sheet covering the top surface of a bellows mechanism. SOLUTION: The cutting apparatus is provided with a chuck table to be reciprocated, a cutting means for cutting a workpiece held on the chuck table while supplying working water, a draining means provided with a drain path arranged along the moving direction of the chuck table, the bellows mechanism 62 having its one end fitted to the chuck table and the other end fitted to a standstill member, the protection sheet 75 which covers the top surface of the bellows mechanism 62 and has its one end fitted to the chuck table, a winding means disposed on the front side for winding up or out the protection sheet with moving of the chuck table, and a cutting refuse collection means 90 for collecting the cutting refuse having fallen onto the protection sheet and carried by the protection sheet. In addition, the cutting refuse collection means 90 is provided with a water tub 91 housing water, and the winding means is constituted so that the protection sheet may pass through the inside of the water tub. COPYRIGHT: (C)2004,JPO&NCIPI |
