| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and method for shading correction which is capable of performing reliable shading correction and quickly corresponding to a change of shading and is inexpensive, and to provide a recording medium on which a control program is recorded. SOLUTION: An area on a stage 26 where a sample 3 does not exist is moved to a photographing area 65, the sample in this state is photographed by a CCD 42, a bright image signal is gained, at the same time, a gain of the shading produced in the bright image signal is determined and, thereby, a shading correction pattern is prepared. Subsequently, a part to be observed of the sample 3 is moved to the photographing area 65, the sample in this state is photographed by the CCD 42, a main image signal is gained, the main image signal is corrected by the shading correction pattern and, thereby, the shading in the main image signal is removed. COPYRIGHT: (C)2004,JPO&NCIPI
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