| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanner device in which a scanning of a short stroke is quickly performed and the time for positioning of a beam is shortened. SOLUTION: In a galvanoscanner 20, in which a mirror 21 fixed on an armature 25 is oscillated with an electromagnetic driving force generated between the armature 25 and a permanent magnet 26 and an optical beam made incident on the mirror 21 is deflected, a large torque is generated by giving four or more poles to the armature 25, or a resistor of which value is 1/2 or larger than the resistance of the armature 25 is connected in series to the armature 25, and an electric time constant is shortened by supplying a voltage of 1.5 times a rated voltage of the armature 25 or larger to the both end of the resistor connected to the armature 25, or a shorted turn 28 is provided on an electromagnetic circuit. COPYRIGHT: (C)2004,JPO&NCIPI
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