| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and a method for quantitatively evaluating fluorescence intensity of fused quartz for eliminating spectroscopy, having a simple constitution, quickly measuring and reducing a time required for quantitatively evaluating particular color fluorescence of the fused quartz. SOLUTION: The evaluation apparatus of the fused quartz has a laser light source for irradiating a fused quartz sample with a laser light, a detector for receiving a Raman scattering light generated from the fused quartz sample irradiated with the laser light and a band pass filter provided on an optical path of the Raman scattering light between the fused quartz sample and the detector, for reciprocation, transmitting only the particular color fluorescence. The measurement method uses the apparatus. COPYRIGHT: (C)2004,JPO&NCIPI
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