| 摘要 |
PROBLEM TO BE SOLVED: To provide a division-type sputtering target in which generation of arcing is prevented because the arcing is generated when a lining of a polymer heat-resistant sheet such as Teflon (R) and polyimide is affixed to a surface on the bonding side of a joint between the targets, and the sputtering cannot be continued. SOLUTION: In the division-type sputtering target, a conductive heat-resistant sheet formed of metal such as aluminum or stainless steel is used for a lining. COPYRIGHT: (C)2004,JPO&NCIPI
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