APPARATUS FOR DETECTING ROTATION OF RETICLE AND CONTROL METHOD USING THE SAME TO DETECT WHETHER RETICLE IS LOADED IN RIGHT WAY OR IS ROTATED AT 90 DEGREES

摘要

PURPOSE: An apparatus for detecting rotation of a reticle is provided to detect whether the reticle is loaded in the right way or is rotated at 90 degrees by including a light irradiating part for irradiating a laser beam to a pellicle and a light receiving part for receiving the laser beam reflected from the pellicle. CONSTITUTION: A reticle detecting part detects where the reticle(10) is positioned or whether the reticle exists. A pellicle detecting part(300) detects where the pellicle(20) is positioned or whether the pellicle exists. A reticle receiver driving part drives a reticle receiver. The reticle detecting part and the pellicle detecting part are connected to the input part of a controller that controls the reticle receiver driving part according to a reticle detecting signal and a pellicle detecting signal. A display unit displays the loading state of the reticle.