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发明名称
MAGNET FOR GENERATING A MAGNETIC FIELD IN AN ION SOURCE
摘要
申请公布号
SG106057(A1)
申请公布日期
2004.09.30
申请号
SG20010004694
申请日期
2001.08.03
申请人
AXCELIS TECHNOLOGIES, INC.
发明人
BO HARALD VANDERBERG;THOMAS NEIL HORSKY;FRANK RAYMOND TRUEIRA
分类号
H01J27/08;H01J37/08;(IPC1-7):H01J37/08
主分类号
H01J27/08
代理机构
代理人
主权项
地址
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