| 摘要 |
PROBLEM TO BE SOLVED: To provide a processing method and system which realize a high quality processing without causing a decrease in predetermined throughput or yield, and by preventing an occurrence of dew condensation. SOLUTION: The system comprises a vessel with its inside decompressed or kept in vaccumm atmosphere and for conducting the predetermined processing on the work to be processed, and an atmosphere substituting chamber having a first and a second gate valves. The atmosphere substituting chamber is communicated with the vessel through the first gate valve and is communicated with an atmospheric air through the second gate valve. The processing method comprises the steps of exhausting the atmosphere substituting chamber by introducing a first dried gas having not more than the predetermined humidity into the atmosphere substituting chamber, and exhausting vacuum of the atmosphere substituting chamber by stopping the introduction of the first gas after the exhausting step. COPYRIGHT: (C)2004,JPO&NCIPI |
