| 摘要 |
PROBLEM TO BE SOLVED: To provide equipment and a method for measuring wave aberration with high precision without using actual wavelength. SOLUTION: Equipment for measuring the wave aberration of an optical system for soft X-rays comprises a light intensity detector for irradiating the optical system with a light having wavelength of 150-300 nm and detecting an interference pattern of a light passed through the optical system and measuring wave aberration of the optical system based on the detection results from the light intensity detector. COPYRIGHT: (C)2004,JPO&NCIPI |
