APPARATUS AND METHOD FOR CLEANING BRUSH

摘要

PROBLEM TO BE SOLVED: To provide a cleaning apparatus capable of uniformly, reliably cleaning a substrate by a cleaning brush. SOLUTION: The brush cleaning apparatus for supplying a cleaning liquid to a substrate conveyed in a specific direction for cleaning comprises the cleaning brush 5 having a holder 6 provided along a direction crossing the conveyance direction of the substrate and brush bristles 7 retained by the holder; an ultrasonic generator 11 provided in the cleaning brush; and an ultrasonic generator 12 that drives the ultrasonic generator for ultrasonically vibrating the brush bristles of the cleaning brush. COPYRIGHT: (C)2004,JPO&NCIPI