YTTRIUM OXIDE (Y2O3) SINTERED COMPACT AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a dense translucent Y2O3sintered compact with a simple operation without necessitating a specific sintering vessel or a Y2O3packing powder. SOLUTION: The Y2O3sintered compact is manufactured by a process for forming a Y2O3raw material having≥99 wt.% purity and≤2μm average particle diameter and a process for sintering the resultant formed body at 1,710-1,850°C under a hydrogen atmosphere to form Y2O3crystal having 10-800μm average crystal grain diameter. In this manner, the high purity, dense and excellent mechanical strength sintered compact suitable for a semiconductor treatment apparatus, particularly a treatment apparatus using plasma is provided. COPYRIGHT: (C)2004,JPO&NCIPI