发明名称 METHOD OF FORMING GROOVE ON CORE ROD FOR MANUFACTURING DYNAMIC-PRESSURE BEARING
摘要 PROBLEM TO BE SOLVED: To provide a method of forming a groove on a core rod for manufacturing a dynamic-pressure bearing, which can transfer-form the internal circumferential surface of the dynamic-pressure groove of the dynamic-pressure bearing with high accuracy, and produce the dynamic pressure bearing superior in productivity. SOLUTION: The method of forming the groove on the core rod for manufacturing the dynamic-pressure bearing is to transfer-form the dynamic-pressure groove in the internal circumferential surface of the dynamic-pressure bearing, wherein the core rod is made from a hard metal containing tungsten; the shape of the groove on the core rod corresponding to the dynamic-pressure groove is formed by a process combining a photolithographic technique with an electroetching method; the electrolytic solution employed in the electroetching method is an aqueous solution of at least one compound selected from sodium hydroxide and potassium hydroxide; the aqueous solution has a concentration of 5 wt.% or higher but the saturated concentration or lower in 25°C; and the photoresist employed in the photolithographic technique has such an alkaline resistance as to endure the electrolytic solution. COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004269911(A) 申请公布日期 2004.09.30
申请号 JP20030058432 申请日期 2003.03.05
申请人 NTN CORP 发明人 MURAMATSU KATSUTOSHI
分类号 G03F7/20;C25F3/00;C25F3/02;C25F3/14;F16C17/02;F16C33/14;(IPC1-7):C25F3/14 主分类号 G03F7/20
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