| 摘要 |
PROBLEM TO BE SOLVED: To prevent a vacuum sealability between a crucible and a vacuum chamber from lowering. SOLUTION: A substrate holder 5 set with a substrate 4 at the center in the central part of the vacuum chamber 1 is attached to a bottom wall 1L of the chamber in such a manner that the crucible 8 having a recessed part 7 for housing an evaporation material 6 below the substrate holder 5 is movable to a vertical direction. The one end of a first cylindrical body 16 is attached to the bottom wall 1L of the chamber and another end of a second cylindrical body 17 of the diameter slightly larger than the diameter of the first cylindrical body is attached to an upper side face of the crucible 8. These cylindrical bodies are formed to the length at which the other end of the first cylindrical body 16 overlaps on the first end of the second cylindrical body 17. COPYRIGHT: (C)2004,JPO&NCIPI
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