发明名称 |
Optical system adjusting method for energy beam apparatus |
摘要 |
A method for adjusting an optical system of an energy beam apparatus by using a mark signal that is obtained by one-dimensionally or two-dimensionally scanning a mark on a sample with an energy beam. The mark has a one-dimensional or two-dimensional periodic structure. A first mark signal is detected by scanning the mark with a beam. The mark is set on the optical axis of the optical system. A second mark signal is detected by scanning the mark with a beam. The mark is located at a position that is deviated from the optical axis. A deviation of a deflection position is determined based on a phase difference between the first and second mark signals.
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申请公布号 |
US2004190006(A1) |
申请公布日期 |
2004.09.30 |
申请号 |
US20040819201 |
申请日期 |
2004.04.07 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
OGASAWARA MUNEHIRO;TAKAMATSU JUN;SUNAOSHI HITOSHI;SHIMOMURA NAOHARU |
分类号 |
G01B11/03;H01J37/304;(IPC1-7):G01B11/14 |
主分类号 |
G01B11/03 |
代理机构 |
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