| 摘要 |
<P>PROBLEM TO BE SOLVED: To manufacture a polarizing optical element as an "inorganic material product" having a high-precision surface three-dimensional structure at low cost with good reproductivity by simplifying processes of production. <P>SOLUTION: A metal mold after release processing is coated with ultraviolet-ray setting resin 16, and a light-transmissive product substrate 2 after silane coupling processing is pressed against the resin; and the reverse surface side of the product substrate 2 is irradiated with uniform ultraviolet rays to set the ultraviolet-ray setting type resin layer 16 and then the metal mold is released. The shape of t he resin layer 16 is transferred to the product substrate 2 by dry etching. A TiN film is formed to about 8 nm on the surface where the pattern of the product substrate 2 is formed, an AL-CVD film is formed thereupon to 0.12 μm, and a groove is completely filled. After reflow processing is carried out for five minutes at 350°C, an aluminum film is etched back to the surface of the product substrate to manufacture a polarizing optical element having a conductive element array of aluminum buried in a quartz substrate. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
