摘要 |
A pressure sensor has a housing with an opening exposing a cavity, a barrier diaphragm across the opening, a pressure sensing element within the cavity, and a fill fluid within the cavity. The fill fluid comprises a fluid and a filler, the fluid has a TCE associated therewith, the housing has a TCE associated therewith, and the filler lowers the TCE of the fluid to a level matching the TCE of the housing. Accordingly, the housing and the fill fluid do not exhibit temperature induced dimensional changes relative to one another that cause plastic deformation of the barrier diaphragm. |