| 发明名称 |
OPTICAL ELEMENT AND ITS MANUFACTURING METHOD |
| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an optical element which is high in design flexibility concerned with a shape and its manufacturing method. <P>SOLUTION: A recess 2 is formed in a silicon substrate 1 and a plurality of column structures 4 made of silicon oxide are adjacently stood on the bottom surface of the recess 2, and a silicon oxide block 3 is constituted which is united with the silicon substrate 1. Microlenses are constituted with the silicon oxide block 3 and then, light is transmitted. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
| 申请公布号 |
JP2004271756(A) |
申请公布日期 |
2004.09.30 |
| 申请号 |
JP20030060548 |
申请日期 |
2003.03.06 |
| 申请人 |
DENSO CORP |
发明人 |
OOHARA ATSUSHI;KANO KAZUHIKO;NODA MICHITAKA;TAKEUCHI YUKIHIRO;MORISHITA TOSHIYUKI |
| 分类号 |
G02B6/122;B81B7/04;B81C1/00;G02B3/00;G02B6/13;G02B6/42;H01L27/146;H01L31/0232;(IPC1-7):G02B3/00 |
主分类号 |
G02B6/122 |
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