| 摘要 |
PROBLEM TO BE SOLVED: To provide high speed and high precision positioning control by sufficiently suppressing residual vibration of a load tip in consideration of damping of natural vibration of a load machine. SOLUTION: A transfer function F<SB>1</SB>(s) of a secondary filter 15 for receiving an S-shaped position command to output a position command to a feedback system is expressed by Formula 1, whereω<SB>1</SB>is a natural angular frequencyω<SB>0</SB>of a load machine,ζ<SB>1</SB>is a natural vibration damping coefficientζ<SB>0</SB>of the load machine, andω<SB>2</SB>is set with an acceleration time t<SB>a</SB>or a time t<SB>d</SB>from an acceleration start to a deceleration start in the S-shaped position command so as to fulfill Formula 2 or Formula 3 (where k is a natural number). The addition of a primary term (2ζ<SB>1</SB>/ω<SB>1</SB>s)of s to the numerator of the secondary filter 15 in consideration of damping of mechanical vibration can sufficiently suppress residual vibration at a load tip position X<SB>h</SB>. COPYRIGHT: (C)2004,JPO&NCIPI
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