| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a lapping method for providing stable surface roughness even if a variation is caused in an abrasive grain state of a lapping film surface in the middle of lapping. <P>SOLUTION: This lapping method is a surface working method for working a surface of a work by applying relative vibration to a lapping film to the work (Step S3) simultaneously when applying rotation to the work by pressing the lapping film adhering an abrasive grain to one surface thereof to the work from the opposite side of the abrasive grain by a pressing member (Step S1, and S2), and comprises a process (Step S4) of detecting an electric current of a motor used in at least one of a rotational driving unit for applying rotational motive power to the work and an oscillation unit for applying the relative vibration to the work, and a process (Step S5) of determining the loading of the lapping film in the middle of the lapping on the basis of a detecting result. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
