| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing electronic component by which the connection reliability of columnar conductors making interlayer connections can be improved without making the accuracy of the conventional mask strict, and to provide an electronic component. SOLUTION: By the method of manufacturing electronic component, an electronic component is provided with a plurality of wiring patterns, an insulating layer interposed between the wiring patterns, and the columnar conductors which are formed through the insulating layer and electrically connect the wiring patterns to each other. After the columnar conductors are formed to exceed their set heights, the heights of the conductors are reduced to the set heights by polishing the conductors from above and, at the same time, connecting heads are formed so that the sections may exceed the underhead cross-sectional areas of the columnar conductors. When an upper layer side is connected to the expanded connecting heads, the connection reliability of the columnar conductors can be improved. COPYRIGHT: (C)2004,JPO&NCIPI |
