发明名称 |
Interferometric servo control system for stage metrology |
摘要 |
The invention features a method for determining non-linear cyclic errors in a metrology system that positions a measurement object under servo-control based on an interferometrically derived position signal. The method includes: translating the measurement object under servo-control at a fixed speed; identifying frequencies of any oscillations in the position of measurement object as it is translated at the fixed speed; and determining amplitude and phase coefficients for sinusoidal components at the identified frequencies which when combined with the position signal suppress the oscillations. The invention also features a method for positioning a measurement object under servo-control based on an interferometrically derived position signal indicative of a position for the measurement object. This method includes: generating a compensated position signal based on the interferometrically derived position signal and at least one correction term that has a sinusoidal dependence on the position of the measurement object; and repositioning the measurement object based on the compensated position signal and a desired position for the measurement object.
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申请公布号 |
US2004189998(A1) |
申请公布日期 |
2004.09.30 |
申请号 |
US20040819257 |
申请日期 |
2004.04.05 |
申请人 |
ZYGO CORPORATION, A DELAWARE CORPORATION |
发明人 |
HILL HENRY A. |
分类号 |
G01B9/02;G02B9/02;G02B11/02;G03F7/20;G05B19/19;(IPC1-7):G01B9/02 |
主分类号 |
G01B9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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