发明名称 Capacitor having copper electrodes and diffusion barrier layers
摘要 A capacitor has a couple of electrodes with a dielectric placed therebetween. At least one of the electrodes is made of copper, and barriers for preventing the diffusion of copper into the dielectric are provided between the dielectric and the copper electrode, respectively.
申请公布号 US2004190220(A1) 申请公布日期 2004.09.30
申请号 US20040822757 申请日期 2004.04.13
申请人 MATSUHASHI HIDEAKI 发明人 MATSUHASHI HIDEAKI
分类号 H01L23/52;H01L21/02;H01L21/285;H01L21/3205;H01L21/768;H01L21/822;H01L27/04;(IPC1-7):H01G4/008 主分类号 H01L23/52
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