发明名称 Stacked gate flash memory device and method of fabricating the same
摘要 A stacked gate flash memory device and method of fabricating the same. A cell of the stacked gate flash memory device in accordance with the invention is disposed in a cell trench within a substrate to achieve higher integration of memory cells.
申请公布号 US2004188751(A1) 申请公布日期 2004.09.30
申请号 US20040819464 申请日期 2004.04.06
申请人 NANYA TECHNOLOGY CORPORATION 发明人 LIN CHI-HUI
分类号 H01L21/265;H01L21/8247;H01L27/115;H01L29/423;H01L29/788;(IPC1-7):H01L21/336 主分类号 H01L21/265
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