发明名称 SUBSTRATE HAVING DEVICE TO BE TESTED, METHOD FOR FABRICATING THE SAME, SUBSTRATE FOR ELECTROOPTIC DEVICE, ELECTROOPTIC DEVICE, AND ELECTRONIC DEVICE
摘要 PURPOSE: A substrate having a device to be tested, a method for fabricating the substrate, a substrate for an electrooptic device, an electrooptic device and an electronic device are provided to correctly estimate characteristics of layer patterns and securely expose a pad through one-time etching. CONSTITUTION: A substrate for an electrooptic device includes a plurality of line patterns(111,112) formed of a layer on a substrate having a device to be tested, an interlevel layer(113) formed on the plurality of line patterns, a plurality of contact holes(114,115) formed in the interlevel layer, corresponding to parts of the line patterns, and a layer formed between the substrate and the line patterns. The interlevel layer has a flat surface. The thicknesses of the layer, corresponding to the contact holes, are equal or similar.
申请公布号 KR20040082983(A) 申请公布日期 2004.09.30
申请号 KR20040018658 申请日期 2004.03.19
申请人 SEIKO EPSON CORPORATION 发明人 KURASHINA HISAKI
分类号 G02F1/13;G02F1/03;G02F1/07;G02F1/133;G02F1/1343;G02F1/1345;G02F1/1362;G02F1/1368;G09F9/30;H01L21/3205;H01L23/52;H01L29/786;(IPC1-7):G02F1/134 主分类号 G02F1/13
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