| 摘要 |
PROBLEM TO BE SOLVED: To provide a lapping device for providing stable lapping, and serviceably using a lapping film by preventing nonuniformity of an abrasive grain state generated on a lapping film surface. SOLUTION: This lapping device has a rotational driving means 20 for rotatably holding a work W, the lapping film 1 for arranging an abrasive grain on one surface of a nonexpansible and deformable thin base material, a shoe case 3 for pressing an abrasive grain surface of the lapping film 1 to the work W by shoes 2 by holding a plurality of shoes 2, and a winding reel 6 for sending out the lapping film 1. A distance between the adjacent shoes 2 is set to integer times a width of the shoes 2 in the sending-out direction of the lapping film 1. The winding reel 6 sends out the lapping film by the distance between the adjacent shoes 2 when stopping the lapping. COPYRIGHT: (C)2004,JPO&NCIPI |
