| 摘要 |
PROBLEM TO BE SOLVED: To provide a film forming method and a film forming apparatus capable of efficiently producing aerosol of a constant particle concentration and efficiently obtaining a good quality film in a film forming process of forming the film composed of a plurality of particles on the surface of a base body by using the aerosol, upon manufacture of various kinds of devices. SOLUTION: Dispersion liquid of particles is prepared, the dispersion liquid is supplied into a space in a second chamber 9 as fine droplets by using a liquid supply means 17, then a dispersion medium is vaporized, and thereby the aerosol of the constant particle concentration can be efficiently formed. The aerosol is sprayed onto the base body 7 arranged in a first chamber 5 through a conveyance tube 4 by a pressure difference between the first chamber 5 and the second chamber 9, which is caused by using pressure adjusting means 3, 10, 13, and thereby the good quality film can be efficiently formed on the base body. COPYRIGHT: (C)2004,JPO&NCIPI
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