METHOD AND APPARATUS FOR FILM MAKING, METHOD AND APPARATUS FOR PRODUCING COLOR FILTER SUBSTRATE, METHOD AND APPARATUS FOR PRODUCING SUBSTRATE FOR ELECTROLUMINESCENCE DEVICE, DISPLAY PRODUCING METHOD, DISPLAY, AND ELECTRONIC DEVICE

摘要

PROBLEM TO BE SOLVED: To reduce film making nonuniformity which can not be solved by making the amount of a liquid material to be supplied uniform in a method for film making by depositing the liquid material on an object by using a drop supply means.

SOLUTION: In the film making method, a plane periodic structure having prescribed periodicity is formed by depositing the liquid material on the object 1. With the use of the drop supply means 2 constituted to be able to deposit the liquid material on the object 1 by supplying drops 4a at a driving period Td, the presence/absence of the supply of the drops by the drop supply means at each period of a driving period corresponding to the periodicity of the plane periodic structure to be formed in the object is controlled, and the drops are supplied by the drop supply means while scanning the drop supply means at a scanning speed Vx in the scanning direction X in relation to the object. The natural number times of the product of the driving period Td and the scanning speed Vx is set up to be the structural period in the scanning direction X of the plane periodic structure.

COPYRIGHT: (C)2004,JPO&NCIPI