MANUFACTURING METHOD OF PROBE FOR SCANNING PROBE MICROSCOPE, INSPECTION METHOD, AND USAGE

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a probe for a scanning probe microscope equipped with a peak part made of monolayer carbon nanotubes, its inspection method, and its usage. SOLUTION: According to this manufacturing method of a probe for a scanning probe microscope equipped with a peak part made of monolayer carbon nanotubes, a catalyst metal is given to an end of a probe substrate and then the catalyst given part on the end of the probe substrate is irradiated with arc discharge generated between thin needle-like carbon electrodes in an inert gas atmosphere in the probe microscope, thereby causing the single layer carbon nanotubes to grow up on the catalyst given part. COPYRIGHT: (C)2004,JPO&NCIPI