METHOD AND DEVICE FOR SURFACE POSITION DETECTION, FOCUSING DEVICE, ALIGNER, AND MANUFACTURING METHOD FOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a surface position detecting method by which information of the height of the surface of a transmissible board is detected accurately even if reflected light from the transmissible board contains not only reflected light from the board surface but also that from the board back. SOLUTION: According to the surface position detecting method, light is projected slantly on a detection surface of the transmissible board, and the reflected light from the transmissible board W is received to detect the surface position information of the board W. The light reflected on the detection surface is specified among the reflected light from the transmissible board on the basis of a reflected light strength distribution D to detect the surface position information of the transmissible board. COPYRIGHT: (C)2004,JPO&NCIPI