| 摘要 |
PROBLEM TO BE SOLVED: To provide a characteristic evaluating device for semiconductor device that can accurately measure a switching characteristic of a semiconductor device in a wafer state. SOLUTION: On a wafer 140 mounted and fixed on a stage 130, an unillustrated element (chip) to be measured is formed. The stage 130 is able to horizontally move up and down, and to the right and left. A probe pin 110b and a stage probe pin 150 are connected to a measuring circuit 170 respectively. The position of the probe pin 110b and the position of the stage probe pin 150 are vertically moved up and down to bring the probe pin 110b into contact with the chip, thereby making a measurement. COPYRIGHT: (C)2004,JPO&NCIPI
|
