| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum processor which can be miniaturized and simplified, and is adapted also to the carriage and processing of a substrate 4 having a large area, and moreover, performs in a comparably short time a plurality of processing processes, and further, rearranges diversified kinds of processing processes. SOLUTION: The vacuum processor has a processing chamber 1 maintained in a vacuum space, a rotational carriage mechanism 7 for rotating and moving a substrate 4 intermittently along a circumference in the processing chamber 1, and auxiliary processing chambers 5a, 5b, etc. attached via gate valves 6 to a plurality of positions for stopping therein the substrate 4 carried by the rotational carriage mechanism 7. All the auxiliary processing chambers 5a, 5b, etc. or some of them have processing means for processing respectively the surface of the substrate 4. Further, a plurality of extension ports 8 are provided radially toward the positions for stopping therein the substrate 4 in the processing chamber 1. COPYRIGHT: (C)2004,JPO&NCIPI
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